Lext OLS3000IR
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LEXT OLS3000IR: semiconductor inspection from the inside: Olympus Adds High Resolution Confocal System to its Non-Destructive Silicon Imaging Product Range
Designed for the non-destructive, high resolution observation of the interior of silicon wafers, IC chips, MEMS and other devices, the LEXT IR uses a 1310 nm laser to literally see through the silicon to the components.