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• High-resolution 3D observation and measurement in real time
• "One click 3D" capture button
• Highly reliable fine surface profile measurement
• Fast and easy operation
• Repeatability |
 LEXT OLS3100
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• Certified accuracy and repeatability
• High resolution (down to 120nm L&S)
• Outstanding slope detection capability
(up to 85°)
• Roughness testing according to all standards
• Advanced dual pinhole technology for superior flexibility |
LEXT OLS4000
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