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Key Features for LEXT OLS4000 |
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 Certified accuracy and repeatability
High resolution (down to 120nm L&S)
Outstanding slope detection capability
(up to 85°)
Fast and easy operation environment
Roughness testing according to all
standards
Advanced dual pinhole technology for
superior flexibility |
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Superior Resolution and Accuracy
The optical system designed for 405nm archieves outstanding resolution of 120nm L&S in X/Y while better than 10nm true resolution in Z in the whole field of view with the new high resolution mode and the advanced Z mode.
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Slopes of more than 85°
Identify topography slopes of more than 85° while being independant of material contrast. Receive reliable results with the help of the new dual pinhole technology.
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State of the art objective lenses
MPlan Apo LEXT - The reference in lens design. Available as 20x, 50x and 100x magnification. |
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Roughness as you want to qualify it
Identify roughness acording to your process needs, while staying backward compatible to any former standard.
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