Specifications for LEXT OLS4000 |
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 Certified accuracy and repeatability
High resolution (down to 120nm L&S)
Outstanding slope detection capability
(up to 85°)
Fast and easy operation environment
Roughness testing according to all
standards
Advanced dual pinhole technology for
superior flexibility |
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OLS4000 |
| Observation method |
Laser, Laser confocal DIC, brightfield, DIC, polarisation |
| Main body |
Illumination |
Laser |
405nm LD laser, Class 2 |
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| Brightfield |
White LED illumination |
| Z stage |
Vertical movement |
100mm |
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| Maximum height of specimen |
130mm |
| Z length measuring part |
Stroke |
10mm |
| Built-in scale |
0.8nm |
| Index step |
10nm |
| Display resolution |
1nm |
| Objective lenses |
5x, 10x, 20x, 50x, 100x |
| Optical zoom |
1x-8x |
| Image size |
High resolution mode |
4096x4096 |
| Standard mode |
1024x1024 |
| Band scan mode |
1024x768, 1024x512, 1024x1 |
| Color |
1024x1024 |
| Maximal optical resolution |
Plane: XY |
0.12µm |
| Height: Z |
0.01µm |
| Repeatibility |
Plane: XY |
20x: 3σ = 0.1µm
50x: 3σ = 0.04µm
100x: 3σ = 0.02µm |
| Height: Z |
20x: σ = 0.04µm
50x: σ = 0.012µm
100x: σ = 0.012µm |
| Certified Accuracy |
Plane: XY |
within ± 2% of the measurement value |
| Height: Z |
0.2µm + L/100 or less
L = measured length (µm) |
| Field of view |
5.120-16µm |
| Stage |
Manual stage |
100x100mm |
| Motorised stage ultrasonic type |
100x100mm |
| Motorised stage stepper type |
300x300mm |
| Weight |
30.2 kg
except revolver, objective lenses, stage and rotating holder |
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