Key Features for analysis Filter Inspector |
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 Fully automated analysis of residues
on circular filters
Complete process handling
Particle and classification sheets,
particle maps, height maps and
classification
Automated archiving and documentation
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Optimal hardware performance
Wafer or filter analysis involves analysing large areas in the shortest time possible. The analysis Filter Inspector is especially conceived to provide fast analysis at high resolution. This is how circular filters 50 mm in diameter are completely characterised within 15 minutes and at a resolution of 0.8 µm. These speeds are achieved using special cameras and motorised stage controllers.
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Analysing residue on circular substrates
The analysis Filter Inspector analyses residue(s) on circular filters fully automatically. This procedure detects the precise number of dirt particles on the entire filter. The circular filter is scanned in its entirety and the images are automatically analysed and classified. Selection of analysis and classification parameters is completely up to the user. Detection and classification is carried out with respect to area, diameter, shape and so on. Based on this data, particle and classification data, as well as contamination maps (among other things) can be generated. Based on user-defined templates, the accompanying report is automatically generated. All relevant measurement results, histograms, reports and sample data are saved in the user-definable inspection database.
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Particle analysis
Using the analytical functions offered by analysis Filter Inspector, thousands of image objects can be quantitatively detected and analysed within seconds. The analyses can be applied either to the entire image or to image segments. Particle detection supports the analysis of multi-phase objects. The selection of measurement criteria on offer in this software is practically unlimited. Conducting evaluations according to multiple criteria can be carried out in a single operation. It is easy to verify the analytical data because the data is linked to the particle within the image.
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Structured archiving and professional documentation
analysis Filter Inspector allows quick, systematic and thorough documenting, book keeping and reporting. All series of acquisitions are saved together with all experimental parameters in a multi-dimensional image format. The powerful, integrated image archiving system handles images and all data generated during image processing and documentation. The report generator makes creating norm-compliant reports convenient, quick and easy.
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analysis Filter Inspector related Application Report |
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